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Journal of Electron Microscopy 41(2): 116-119 (1992)
© 1992 Oxford University Press

A Method for Measuring Film Thickness by Zone Axis Contrast of TEM Image

Yoshizo Takai

Department of Applied Physics, Faculty of Engineering, Osaka University 2-1 Yamada-oka, Suita, Osaka, 565 Japan

The thickness of a bending thin film was determined by the comparison of the observed contrast of zone axis patterns with the calculated contrast based on a dynamical electron diffraction theory. This method allows us to measure the film thickness nondestructively at the symmetry Bragg reflection position where crystal lattice images appear clearly. Therefore, it seems to be a useful technique for high resolution electron microscopy. The estimation of the film thickness can be easily performed if the contrast of the patterns has been calculated once as a function of thickness. The accuracy of this method was estimated to be ±2nm around 10nm.

Keywords     transmission electron microscope (TEM), dynamical electron diffraction theory, zone axis pattern, gold thin film, thickness measurement

Received      5 August 1991, accepted 23 October 1991


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