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Journal of Electron Microscopy 43(6): 406-407 (1994)
© 1994 Oxford University Press

Magnification Dependence of Aberration Coefficients in Electrostatic Bipotential Lens

Katsumi Ura

Department of Electrical and Electronic Engineering, Faculty of Engineering. Osaka Sangyo University Nakagaito 3-1-1, Daitou. Osaka, 574 Japan

Magnification dependence of the spherical aberration coefficients is expressed in a simple polynomial, which was empirically found by rearranging numerical data. Here, it is derived analytically under thin lens approximation.

Keywords     aberration coefficients, electrostatic bipotential lens, magnification dependence, thin-lens approximation

Received     17 August 1994, accepted 6 October 1994


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