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Journal of Electron Microscopy 46(1): 1-9 (1997)
© 1997 Oxford University Press
Correction properties of electron mirrors
Insitute of Applied Physics, Hochschulstrasse 6 D-64289 Dramstadt, Germany
Electron mirrors are capable of correcting the primary spherical and chromatic aberration of rotationally symmetric lenses. The resolution of corrected systems is limited by the higher-order axial aberrations which are determined by means of a time-dependent perturbation procedure. This formalism allows one to calculate the geometric aberrations of a rotationally symmetric electromagnetic electron mirror up to arbitrary order. Relativisric effects are taken into account. The symmetry in time with respect to the turning point is utilized to reduce the number of numerical integrations. In addition analytical formulae are given for the coefficients of the spherical and the axial chromatic aberration. The correction properties are illustrated by means of two realistic examples.
Keywords electron mirrors,, coefficient of spherical aberration,, coefficient of axial chromatic aberration
Received 25 October 1996, accepted 28 October 1996
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