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Journal of Electron Microscopy 46(1): 79-83 (1997)
© 1997 Oxford University Press

Development of coincidence transmission electron microscope (II) Observation of coincidence electron microscopic image

Motohide Yasuno, Yoshihide Kimura and Ryuichi Shimizu

Department of Applied Physics, Faculty of Engineering, Osaka University Yamadaoka 2-1, Suita, Osaka 565, Japan

A coincidence electron microscopic image was successfully observed by using signal electrons that generated characteristic X-rays (Ag L X-rays) during penetration through a specimen (a silver film). The coincidence measurement between the transmitted electrons and characteristic X-rays enables only the signal electrons to be extracted from a tremendous number of background electrons. The system for the coincidence electron microscope is composed of three parts: (1) an energy dispersive type Si (Li) semiconductor detector for characteristic X-rays, (2) a two-dimensional position sensitive detector for transmitted electrons and (3) high speed coincidence electronic circuits. This system enabled the coincidence electron microscopic image of Ag-film to be observed with considerable success, although the spatial resolution wasrather poor. This is mainly due to the chromatic aberration of a weak lens caused by wide-energy spread of the signal electrons.

Keywords     coincidence electron microscope,, elemental mapping,, low radiation damage,, characteristic X-ray,, background elimination

Received      6 August 1996, accepted 28 October 1996


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