Skip Navigation

This Article
Right arrow Full Text (PDF)
Right arrow Alert me when this article is cited
Right arrow Alert me if a correction is posted
Services
Right arrow Email this article to a friend
Right arrow Similar articles in this journal
Right arrow Alert me to new issues of the journal
Right arrow Add to My Personal Archive
Right arrow Download to citation manager
Right arrowRequest Permissions
Google Scholar
Right arrow Articles by Haider, M.
Right arrow Articles by Urban, K.
Right arrow Search for Related Content
PubMed
Right arrow Articles by Haider, M.
Right arrow Articles by Urban, K.
Social Bookmarking
Add to CiteULike   Add to Connotea   Add to Del.icio.us  
What's this?

Journal of Electron Microscopy 47(5): 395-405 (1998)
© 1998 Oxford University Press

Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

Maximilian Haider1, Herald Rose2,*, Stephan Uhlemann1, Bernd Kabius3 and Knut Urban3

1CEOS GmbH Im Neuenheimer Feld 519, D-69120 Heidelberg, Germany
2Institut für Angewandte Physik, Technische Universität Darmstadt Hochschulstraße 6, D-64289 Darmstadt, Germany
3Institut für Festkörperforschung Forschungszentrum Jülich, D-52425 Jülich, Germany

*To whom correspondence should be addressed. E-mail: rose{at}ltoi.iap.physik.tu-darmstadt.de

A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.

Keywords     aberration correction, reduction of artefacts, information limit, contrast enhancement, point spread function, high-resolution TEM

Received      2 April 1998, accepted 26 June 1998


Add to CiteULike CiteULike   Add to Connotea Connotea   Add to Del.icio.us Del.icio.us    What's this?


This article has been cited by other articles:


Home page
 J Electron Microsc (Tokyo)Home page
H. H. Rose
Historical aspects of aberration correction
J. Electron Microsc. (Tokyo), June 1, 2009; 58(3): 77 - 85.
[Abstract] [Full Text] [PDF]

Home page
 J Electron Microsc (Tokyo)Home page
P. E. Batson
Control of parasitic aberrations in multipole optics
J. Electron Microsc. (Tokyo), June 1, 2009; 58(3): 123 - 130.
[Abstract] [Full Text] [PDF]

Home page
 J Electron Microsc (Tokyo)Home page
A. R. Lupini and S. J. Pennycook
Rapid autotuning for crystalline specimens from an inline hologram
J. Electron Microsc. (Tokyo), December 1, 2008; 57(6): 195 - 201.
[Abstract] [Full Text] [PDF]

Home page
 J Electron Microsc (Tokyo)Home page
J. Yamasaki, T. Kawai, and N. Tanaka
A simple method for minimizing non-linear image contrast in spherical aberration-corrected HRTEM
J. Electron Microsc. (Tokyo), June 1, 2005; 54(3): 209 - 214.
[Abstract] [Full Text] [PDF]


Disclaimer: Please note that abstracts for content published before 1996 were created through digital scanning and may therefore not exactly replicate the text of the original print issues. All efforts have been made to ensure accuracy, but the Publisher will not be held responsible for any remaining inaccuracies. If you require any further clarification, please contact our Customer Services Department.