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Journal of Electron Microscopy 47(5): 427-432 (1998)
© 1998 Oxford University Press

An aberration-free imaging technique based on focal depth extension

Takashi Ikuta

Department of Lightwave Sciences, Faculty of Engineering, Osaka Electro-Communication University 18-8 Hatsu-cho, Neyagawa, Osaka 572-8530, Japan E-mail: ikuta{at}isc.osakac.ac.jp

An imaging technique based on focal depth extension in active dynamic hollow cone illumination is proposed and discussed with respect to the influence of the system wave aberration. This imaging method uses a figure (numerical) 8 shaped narrow band-pass (for non-linear image reduction), sign correction (for amplitude/phase image selection) and median frequency range enhancement filter in the two-dimensional Fourier space. A simple analysis for the influence of the aberration shows that the present imaging technique is free from all primary aberrations except for astigmatism. In addition, the effect of higher order axially symmetric wave aberrations can be corrected by the use of the aberration map obtained from the diffractogram of the finally reconstructed image.

Keywords     aberration-free imaging, aberration correction, high-resolution electron microscopy

Received      2 April 1998, accepted 17 July 1998


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