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Journal of Electron Microscopy 48(1): 17-25 (1999)
© 1999 Oxford University Press

Elastic-filtered electron diffraction for structure determination of AIN specimen

Serge Galaup* and Yolande Kihn

Centre d'Elaboration des Matériaux et d'Etudes Structurales, 29 rue J. Marvig, bp 4347, F-1055 Toulouse Cedex, France

*To whom corresponce should be addressed. E-mail: Galaup{at}cemes.fr

On a transmission electron microscope equipped with a serial energy-loss spectrometer, a post-specimen on-line scanning device has been adapted, permitting elastic or inelastic filtered intensity profiles in the images or selected area diffraction patterns to be recorded. From elastically filtered diffraction pattern intensity profiles, the nearest-neighbour correlation distances and coordination numbers in amorphous and polycrystalline samples can be obtained. The properties of the device have been tested on a pure polycrystalline aluminium sample, for which the accuracy of the interatomic distance determination is 0.03 Å in the range 0 to 12 Å. This technique has been used to study the relation between the nanostructure of thin amorphous and polycrystalline films of aluminium nitride and the deposition process.

Keywords     energy filtered electron diffraction, structure determination, radial distribution function, aluminium nitride

Received     30 April 1998, accepted 8 October 1998


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