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Journal of Electron Microscopy 48(1): 27-32 (1999)
© 1999 Oxford University Press

Contrast transfer function under convergent beam illumination measured by field emission gun

Masanori Mitome

National Institute for Research in Inorganic Materials 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan E-mail: mmitome{at}nirim.go.jp

The field emission gun is very useful for transmission electron microscopy because of its high coherency and high current density. The high coherency, however, causes interference fringes at termination of crystal periodicity, and thus it can be inconvenient for observation of non-periodical local structures such as surfaces, interfaces, defects and fine particles. Partially coherent beam with convergent angle of about 3 mrad is suitable for observation of the local structures because it reduces the interference fringes. From theoretical investigation it has been pointed out that the convergent beam illumination can reveal the precise structure of the local structure. In this article contrast transfer function under convergent beam illumination is experimentally measured with use of a 300 kV field emission transmission electron microscope, and compared with theoretical results. It is confirmed that the contrast transfer function is monotonous and has no transfer gap, and moreover the resolution limit shifts toward higher order reflection side than conventional illumination. Consequently the field emission gun and convergent beam illumination are a good combination for observation of non-periodical local structures.

Keywords     contrast transfer function, high resolution, local structure, convergent beam illumination, field emission gun

Received     11 May 1998, accepted 22 October 1998


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