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Journal of Electron Microscopy 48(3): 183-190 (1999)
© 1999 Oxford University Press
High-voltage, high-resolation electron microscopy study on thin sections of phase change optical disk prepared by anultramicrotome
1Samsung Advanced Institute of Technology San 141, Nong-Seo Ri, Ki-Hung Uebm Yong-In Gun, Kyung-Ki Do, 449900, Korea
2DVD R&D Center, Samsung Electronics Co., Ltd 416, Mae-Tan 3 Dong, Pal-Dal Gu, Su-Won City, Kyung-Ki Do, 441742, Korea
3Institute for Advanced Materials Processing, Tohoku University Katahira 211, Aobaku, Sendai, 9805877, Japan
*To whom correspondence should be addressed.E-mail: gspark{at}saitgw.sait.samsung.co.ke
Thin cross-sections of a phase change optical disk were prepared by ultramicrotomy without embedding of the resin. Transmission electron microscope images of the thin sections directly show the constitution of the phase change optical disk, that is, the coating layer (UV resin: 2.05 µm), the reflective layer (Al: 90 nm), the upper dielectric layer (ZnSµSiO2: 37 nm), the recording layer (Ge2Sb2Te5: 20 nm) and the bottom dielectric layer (ZnSSiO2: 160 nm) on the pre-grooved polycarbonate substrate. Its structure on an atomic scale is analysed by high-voltage, high-resolution electron microscopy. Moreover, it is found that the characteristic of the phase change of the optical disk is attributed to the GeTe intermetallic compound of the recording layer formed during the initializing process.
Keywords phase change optical disk, ultramicrotomy, high-resolution electron microscopy, recording layer, Ge2Sb2Te5, GeTe intermetallic compound
Received 30 April 1998, accepted 12 November 1998