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Journal of Electron Microscopy 48(3): 191-204 (1999)
© 1999 Oxford University Press

A beam separator with small aberrations

H. Müller, D. Preikszas* and H. Rose

Institute of Applied Physics, Hochschulstr 6, D-64289 Darmstadt, Germany

*To whom correspondence should be addressed.E-mail: dirk{at}Itoi.iap.physik.tu-darmstadt.de

Beam separators are utilized for splitting the illuminating electrons from the imaging electrons in cathode lenses or for splitting the incident beam from the reflected beam in a mirror corrector. In the latter case the beam separator must have small aberrations to enable a significant increase in resolution. For this purpose a highly-symmetric system is outlined with imaging properties similar to round lenses. A simple and systematic calculation procedure is presented which obtains the aberrations of the beam separator up to arbitrary rank. To include the effect of the fringe fields, a charge simulation method has been developed which yields a high-precision design. The aberrations of the optimized system are compared with those of equivalent standard electron-optical elements.

Keywords     beam separator, sector magnets, curvilinear optic axis, fringe field, charge simulation

Received     27 October 1998, accepted 14 January 1998


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