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Journal of Electron Microscopy 48(3): 205-219 (1999)
© 1999 Oxford University Press

Strtegies for low-and ver-low-energy SEM

L. Frank and I. Müllerovà

Institute of Scientifc Instruments AS CR Kràlovopolskà 147, 612 64 Brno, Czech Republic

Motivations leading to lowering the primary beam energy in the SEM are summarized and arguments are presented in favour of extending the operation range down to tens and units of eV. Possibilities to produce beams at low energies below 1 keV and very low energies below 50-100 eV are reviewed, particularly the principle to keep the primary beam travelling fast within the column and to decelerate it near the specimen. Both possible retarding field elements, an electrostatic immersion lens and a cathode lens, are compared in detail as regards important parameters of microscopes containing them. These include imaging parameters and aberrations, electricfield on the specimen surface, possible electrical and mechanical configurations including the detection principles, and sensitivity to stray fields.

Keywords     low-energy scanning electron microscopy, very-low-energy scanning electron microscopy

Received     22 October 1998, accepted 13 January 1998


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