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Journal of Electron Microscopy 48(4): 399-405 (1999)
© 1999 Oxford University Press

In-situ observation of the microstructural evolution in germanium under the low-energy helium ion irradiation

Kazuto Arakawa, Tetsuo Tsukamoto1, Kentaroh Tadakuma, Kohjiroh Yasuda and Kotaro Ono

Department of Material Science, Interdisciplinary Faculty of Science and Engineering, Shimane University 1060 Nishikawatsu, Matsue 690-8504
1Origin Electric Co., Ltd 1-18-1 Takada, Toshima-ku, Tokyo 171, Japan.E-mail: arakawak{at}ifsel.riko.shimane-u.ac.jp

Effects of helium atoms on the defect clustering in germanium are examined by irradiation with low-energy helium ions, using a specially designed transmission electron microscope which is connected with an ion accelerator. Dynamic microstructure evolution under low-energy (10 keV) helium ion irradiation with a beam flux of 7.0×1016 ions m–2 s–1 is observed at various temperatures between 85 and 870 K. Under around 290 K, a number of small defects (<6 nm in the diameter) are formed, which are probably of vacancy-helium complex and the precursor of (001) lenticular helium bubbles. At about 290-670 K, interstitial-type defects lying on {113} planes are mainly produced which grow to form perfect dislocation loops under the irradiation. The features of the {113} defects introduced under the low-energy helium ion irradiation are compared with those formed by electron irradiation. The enhanced formation of {113} interstitial-type defects and the extensive width of the defects under the irradiation of helium ions above 290 K imply the mechanism of helium cutting saturated bonds between germanium atoms.

Keywords     lattice defect, radiation effect, germanium, helium, ion irradiation, electron microscopy

Received     30 November 1998, accepted 8 January 1999


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