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Journal of Electron Microscopy 48(5): 555-559 (1999)
© 1999 Oxford University Press

Initialization by erasing the surface potential of negatively charged insulators in scanning electron microscope (SEM) observation

Sadao Aoyagi1,* and Katumi Ura2

1JEOL Semiconductor Equipment Division, Application and Research Center 3–1–2 Musashino, Akishima, Tokyo 196–8558
2Osaka Sangyou University Nakagaito, Daitou, Osaka 574–0013, Japan

*To whom correspondence should be addressed

Initialization, which is to erase the non-uniform surface potential of an insulator, is important for reproducible observation and interpretation of the contrast mechanism of negative charging. When primary electrons with an accelerating voltage (whose secondary emission yield is larger than unity) irradiate the surface of an insulator with a non-uniform surface potential, secondary electrons emitted from the surface redistribute over the surface. The secondary electron redistribution suppresses the potential rise at a high potential area and lifts up the potential at a low potential area. As a result, the surface potential becomes uniform on the surface of the insulator.

Keywords     erasing, insulator surface, initialization of surface potential, negative charging of insultor, redistribution of secondary electrons, secondary electron image

Received     22 December 1998, accepted 20 June 1999


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