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Journal of Electron Microscopy 48(5): 569-573 (1999)
© 1999 Oxford University Press

Nanoprobe cathodoluminescence scanning electron microscope as applied to synthesized diamond

Hiroshi Matsuo, Shogo Awata, Yoshihide Kimura and Ryuichi Shimizu

Department of Applied Physics, Faculty of Engineering, Osaka University 2—1, Yamada-oka, Suita, Osaka, 565-0871 Japan. E-mail: h-matsuo{at}ap.eng.osaka-u.ac.jp

A specific cold stage and programmable photon counting system was developed for the nanoprobe cathodoluminescence scanning electron microscope (CLSEM) to characterize synthesized diamonds. This development has enabled the nanoprobe CLSEM to obtain luminescence spectra from synthesized diamond specimens even under irradiation of an electron beam of very low current intensity of 0.1–1 nA at specimen temperature from ~85 K to room temperature. The dependence of the CL-spectra of the free exciton recombination emission ({lambda} = 235.2 nm) on the specimen temperature has led to an evaluation of the physical quantity representing the crystallinity of the synthesized diamond under investigation. The cross-sectional transmission electron microscopic observation has also revealed that the sample is almost free from observable crystal defects, i.e. dislocations, stacking faults etc., which are quite often observed in synthesized diamonds under transmission election microscopy.

Keywords     CL-FESEM, synthesized diamond, FETO

Received     19 January 1999, accepted 24 June 1999


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