Journal of Electron Microscopy 48(5): 591-594 (1999)
© 1999 Oxford University Press
The displacement observation of solid Xe precipitates embedded in Al using HRTEM
National Research Institute for Metal 1-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
*To whom correspondence should be addressed. E-Mail: mitsuisi{at}nrim.go.jp
The visibility of the small shift of atoms of solid Xe precipitates formed by ion- implantation in HVTEM is discussed using HRTEM. Drawing the image intensity profiles of different thickness and defocus values revealed that the visibility is strongly affected by defocus value as expected. On the other hand, the visibility of Xe does not depend on the relative displacement from Al columns during thickness increases in contrast with the HAADF-STEM case. By comparing simulated images with experimental results, the displacement of Xe atoms of 0.5 Å in the [010] direction obtained by HAADF-STEM is also supported by HRTEM.
Keywords high-resolution electron microscopy, Al, Xe precipitate, high-angle annular dark-field STEM
Received 8 January 1999, accepted 6 May 1999