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Journal of Electron Microscopy 49(1): 135-141 (2000)
© 2000 Oxford University Press

Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions

Eisaku Oho*, Kenichi Okugawa and Shigeru Kawamata1

Department of Electrical Engineering, Kogakuin University 2665-1 Nakano-machi, Hachioji, Tokyo 192-0015
1Hitachi Science Systems, Ltd 1040 Ichige, Hitachinaka-shi, Ibaraki 312-0033, Japan

*To whom correspondence should be addressed.E-mail: oho{at}sin.cc.kogakuin.ac.jp

A newly developed SEM system has been utilized for obtaining ultralow-magnification SEM images. It is a successful combination of the modern SEM equipped with a motor drive stage fully controlled with PC and digital image processing techniques for automatic montage. In order to accomplish a practical system, several problems peculiar to the field of SEM, i.e. raster rotation, peripheral distortion and charging effects, are discussed and solved. The function of ultralow-magnification (whole area) observation is important during a scanning electron microscopy session.

Keywords     ultralow-magnification, digital image processing, montage, scanning electron microscope, PC-SEM, active image processing

Received     16 March 1999, accepted 12 October 1999


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