Journal of Electron Microscopy 49(1): 143-148 (2000)
© 2000 Oxford University Press
Electrostatic Russian quadruplet with high demagnification and minimum influence of geometric aberrations
Departamento de Física Aplicada III, Facultad de Física, Universidad Complutense E-28040 Madrid, Spain
*To whom correspondence should be addressed.E-mail: Genoveva{at}eucmax.sim.ucm.es
Based on a combined analytical and numerical modelling, a high-quality probe-forming system is proposed and developed. The Matrizant method is applied to minimize the beam spot size for a fixed beam current. For quadrupoles consisting of four metallic rods, the electric field inside of the quadruplet is computed using an accurate version of the boundary element method. The influence of the rod diameter on the beam spot size is studied for different emittances. The sensitivity of the system to energy spread and mechanical defects is also investigated.
Keywords electrostatic devices, optimization, emittance, non-linear dynamics, geometric aberrations, quadrupole lens system
Received 4 October 1999, accepted 28 October 1999