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Journal of Electron Microscopy 49(1): 93-98 (2000)
© 2000 Oxford University Press

Microstructures in CoPtC magnetic thin films studied by superpositioning of micro-electron diffraction

Masato Tomita1,*, Hiroko Sugiyama2, Eri Sato2, Jean Jacques Delaunay3 and Takayoshi Hayashi3

1NTT Science and Core Technology Laboratory Group
2NTT Advanced Technology Co 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 240-0198
3NTT Integrated Information & Energy Systems Laboratories 3-9-11, Midori-cho, Musashino, Tokyo 180-0198, Japan

*To whom correspondence should be addressed. E-mail: tomita{at}ilab.ntt.co.jp

Cross-sectional transmission electron microscopy observation of CoPtC thin films showed that 10 nm sized ultrafine particles of CoPt typically were elongated along the substrate normal. Analysis of the superposition of 40 micro-electron diffraction patterns showed that there was no preferred crystal orientation of CoPt particles. This superpositioning technique can be applied to thin films, whose X-ray diffraction analysis is difficult due to the small size of the crystals.

Keywords     electron diffraction, superposition, CoPt, carbon, cross-section

Received     11 December 1998, accepted 19 May 1999


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