Skip Navigation

This Article
Right arrow Full Text (PDF)
Right arrow Alert me when this article is cited
Right arrow Alert me if a correction is posted
Services
Right arrow Email this article to a friend
Right arrow Similar articles in this journal
Right arrow Similar articles in ISI Web of Science
Right arrow Similar articles in PubMed
Right arrow Alert me to new issues of the journal
Right arrow Add to My Personal Archive
Right arrow Download to citation manager
Right arrow Search for citing articles in:
ISI Web of Science (17)
Right arrowRequest Permissions
Google Scholar
Right arrow Articles by Hirotsu, Y.
Right arrow Articles by Sugiyama, M.
Right arrow Search for Related Content
PubMed
Right arrow PubMed Citation
Right arrow Articles by Hirotsu, Y.
Right arrow Articles by Sugiyama, M.
Social Bookmarking
Add to CiteULike   Add to Connotea   Add to Del.icio.us  
What's this?

Journal of Electron Microscopy 50:435-442 (2001)
© 2001 Oxford University Press

Paper

Application of nano-diffraction to local atomic distribution function analysis of amorphous materials

Yoshihiko Hirotsu, Manabu Ishimaru, Tadakatsu Ohkubo, Takeshi Hanada and Masaaki Sugiyama

Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan
Advanced Technology Laboratory, Nippon Steel Corp., Futtsu 293-0011, Japan

A method is proposed for the local atomic distribution function analysis of amorphous materials. This method is based on local halo-electron diffraction intensity analysis with nano-sized electron probes as small as 25 ~ 3 nm, taking advantage of the intensity recording with imaging plate. Nano-diffraction and selected area electron diffraction (SAED) patterns from an amorphous SiNx (x ~4/3) thin film were taken using a conventional transmission electron microscope operated at 200 kV and recorded on imaging plates. An intensity correction to omit inelastic intensity was made using electron energy-loss spectroscopy. When a beam-convergence angle is larger than 1 x 10-3 rad, the Wiener-filter deconvolution method becomes helpful in producing atomic pair distribution functions (PDFs) from the nano-diffraction intensity profiles that are more similar to the PDF from the SAED intensity. This technique was applied to the analysis of local amorphous structures of SiO2 layers formed by an oxygen-ion implantation into single crystal SiC.

Keywords     structure analysis, amorphous materials, nano-diffraction, distribution function analysis, imaging plate, SiO2


Add to CiteULike CiteULike   Add to Connotea Connotea   Add to Del.icio.us Del.icio.us    What's this?




Disclaimer: Please note that abstracts for content published before 1996 were created through digital scanning and may therefore not exactly replicate the text of the original print issues. All efforts have been made to ensure accuracy, but the Publisher will not be held responsible for any remaining inaccuracies. If you require any further clarification, please contact our Customer Services Department.