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Journal of Electron Microscopy 50:541-544 (2001)
© 2001 Oxford University Press

Letter

High-resolution transmission electron microscopy observation of the cross-sectional structure of reconstructed silicon (5,5,12) surface

Junliang Liu, Masaki Takeguchi, Miyoko Tanaka, Hidehiro Yasuda and Kazuo Furuya

National Research Institute for Metals, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan

The cross-sectional reconstructed structure of Si (5,5,12) surface was, for the first time, observed using ultrahigh vacuum high-resolution transmission electron microscopy (UHV-HRTEM) profile view method. In the high-index region, two units of the (337) surface combine with one units of the (225) surface to complete one unit cell of (5,5,12) surface. The (337) unit at one side of the (225) unit is distinctly different from that at another side of (225) unit. The observed HRTEM images do not agree with the previous structural models of the (5,5,12) surface. We propose a new structure model of this surface using a TEM image simulation. Our model is agreement with the previously reported scanning tunnelling microscope images.

Keywords     silicon, high-index surface, reconstruction, UHV-HRTEM


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