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Journal of Electron Microscopy 51:S87-S96 (2002)
© 2002 Oxford University Press

Full-length paper

Quantitative evaluation of zero-loss and core-loss images by using EF-TEM

Takeshi Omura1, Masashi Watanabe2,3 and Yoshitsugu Tomokiyo1,*

1Department of Materials Science and Engineering and
2Research Laboratory for High Voltage Electron Microscopy, Kyushu University, Fukuoka 812-8581, Japan and
3Present address: Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015-3195, USA

To whom correspondence should be addressed. E-mail: tomokiyo{at}zaiko.kyushu-u.ac.jp

Abstract Zero-loss electron filtering and core-loss electron filtering are newly developed imaging techniques in transmission electron microscopy (TEM). In this study, a new energy-filtering TEM, JEOL JEM-2010FEF, is used to take the zero-loss images and Si L2,3 core-loss maps from a standard thin-film MAGI*CALTM, which is a cross-sectional multilayer with known layer-thicknesses of Si and Si-Ge. To evaluate the qualities of the zero-loss images and Si maps quantitatively, several parameters are defined at first. Then, the effects of the specimen thickness and the objective-aperture size on the images are discussed.

Keywords     energy-filter, zero-loss imaging, core-loss imaging, image resolution, signal-to-noise ratio, signal-to-background ratio


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