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Journal of Electron Microscopy 52:101-109 (2003)
© 2003 Oxford University Press

A practical method for the remote control of the scanning electron microscope

Atsushi Yamada1,*, Osamu Hirahara1, Takayoshi Tsuchida2, Naoki Sugano2 and Masaru Date1

1JEOL Ltd, 1-2 Musashino 3-Chome, Akishima, Tokyo 196-8558 and 2JEOL Technics Ltd, 6-38 Musashino 2-Chome, Akishima, Tokyo 196-0021, Japan

*To whom correspondence should be addressed. E-mail: ayamada{at}jeol.co.jp

We have developed a remote control system for the scanning electron microscope (SEM). It is called Web-SEM and can be accessed by anyone through the Web browser. It is not necessary to install special software to control the SEM. Because the operating performance changes with the amount of traffic on the Internet, we have connected the Web-SEM to a LAN/Internet in order to overcome this. We have checked the performance of the remote control operation and we were able to perform focus adjustment, stage movement, etc. over the Internet by improving the method of operation and image transfer.

Keywords     remote control, SEM, LAN/Internet, image transfer


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