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Journal of Electron Microscopy Advance Access originally published online on January 13, 2006
Journal of Electron Microscopy 2005 54(6):515-517; doi:10.1093/jmicro/dfi069
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© The Author 2006. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please email: journals.permissions@oxfordjournals.org

On the origin of HOLZ lines splitting near interfaces: multislice simulation of CBED patterns

Andrey Chuvilin1,*, Ute Kaiser1, Quentin de Robillard2 and Hans-Jürgen Engelmann2

1 University of Ulm Albert Einstein Allee 11, D-89069 Ulm, Germany
2 AMD Saxony LLC & Co. KG PO Box 110110, D-01330 Dresden, Germany

*To whom correspondence should be addressed. E-mail: andrey.chuvilin{at}uni-ulm.de

Splitting of HOLZ lines on CBED patterns is systematically observed at the proximity of interfaces and prevents local strain measurements by monitoring of line shifts. It was previously suggested that such splitting occurs due to interface-strain relaxation in thin TEM lamella. Here we confirm this model by dynamical simulation of CBED patterns using the multislice algorithm.

Keywords     CBED, strain analysis, line splitting, dynamical simulation, multislice

Received      4 March 2005, accepted 12 December 2005


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