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Journal of Electron Microscopy Advance Access originally published online on November 13, 2007
Journal of Electron Microscopy 2007 56(5):171-175; doi:10.1093/jmicro/dfm022
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© The Author 2007. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Measurement of Electric Potential Distributions Around Feg-Emitters by Electron Holography

Tetsuo Oikawa1,*, Joong Jung Kim2, Takeshi Tomita1, Hyun Soon Park2 and Daisuke Shindo2

1 JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo 196-8558, Japan
2 Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 1-1 Katahira, 2-Chome, Aobaku, Sendai 980-8577, Japan

* To whom correspondence should be addressed. E-mail: oikawa{at}jeol.co.jp

An evaluation technique for field emission guns (FEG-emitters) was established by using electron holography. For performing electron holography under an applied voltage, a specimen holder with the capabilities of three-directional motion as well as voltage application was developed. An unused Schottky emitter and a used emitter that had failed after operating for about 10 000 h were selected for this study. By visualizing the electric potential distributions around the emitters, it was clarified that a change in the edge shape of the emitter led to the change in the strength of the electric field. The observations revealed that electron holography can be applied to evaluate the performances of the various emitters.

Keywords     FEG-emitter, electron holography, electric potential distribution

Received      1 February 2007, accepted 13 August 2007


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