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Journal of Electron Microscopy Advance Access originally published online on November 27, 2007
Journal of Electron Microscopy 2007 56(6):217-224; doi:10.1093/jmicro/dfm029
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© The Author 2007. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Quantitative Evaluations of a High-Voltage Multiscan CCD Camera

Young-Min Kim1,2,, Jeong Yong Lee2, Daniel Moonen3, Kang-Il Jang3 and Youn-Joong Kim1,*

1 Division of Electron Microscopic Research, Korea Basic Science Institute, 52 Eoeun-dong, Yuseong-gu, Daejeon 305-333, Korea
2 Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea and
3 Gatan Inc., 5933 Coronado Lane, Pleasanton, CA 94588, USA

* To whom correspondence should be addressed. E-mail: y-jkim{at}kbsi.re.kr

Electron detection characteristics such as modulation transfer function (MTF), detection quantum efficiency (DQE), dynamic range, linearity, average gain, and uniformity of a high-voltage multiscan CCD (HV-MSC, 1K x 1K pixels) camera were evaluated. This camera was used as a major recording medium in a high-voltage electron microscope (HVEM) installed at the Korea Basic Science Institute (KBSI). In spite of the high energy of the incident electrons, the overall properties of the HV-MSC camera were comparable to other CCD cameras for a low-voltage electron microscope (LVEM). In order to take full advantages of the properties of the HV-MSC camera for atomic resolution electron microscopy, we discuss optimal experimental conditions based on the detection properties.

Keywords     HV-MSC camera, CCD detector, electron detection, high voltage, HVEM

Received     13 July 2007, accepted 2 October 2007


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