Skip Navigation

Journal of Electron Microscopy 2008 57(2):41-45; doi:10.1093/jmicro/dfn001
This Article
Right arrow Full Text
Right arrow Full Text (PDF)
Right arrow Alert me when this article is cited
Right arrow Alert me if a correction is posted
Services
Right arrow Email this article to a friend
Right arrow Similar articles in this journal
Right arrow Similar articles in ISI Web of Science
Right arrow Similar articles in PubMed
Right arrow Alert me to new issues of the journal
Right arrow Add to My Personal Archive
Right arrow Download to citation manager
Right arrowRequest Permissions
Google Scholar
Right arrow Articles by Isakozawa, S.
Right arrow Articles by Baba, N.
Right arrow Search for Related Content
PubMed
Right arrow PubMed Citation
Right arrow Articles by Isakozawa, S.
Right arrow Articles by Baba, N.
Social Bookmarking
Add to CiteULike   Add to Connotea   Add to Del.icio.us  
What's this?

© The Author 2008. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

The development and characteristics of a high-speed EELS mapping system for a dedicated STEM

Shigeto Isakozawa1, Kazutoshi Kaji1, Konrad Jarausch2, Shohei Terada3 and Norio Baba4,*

1 Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan
2 Hitachi High Technologies America, Inc., 5100 Franklin Drive, Pleasanton, CA 94588, USA
3 Hitachi Research Lab., Hitachi Ltd., 711 Ohmika, Hitachi, Ibaraki 319-1292 and
4 Kogakuin-University, 1-24-2 Nishi Shinjuku, Shinjuku, Tokyo 163-8677, Japan

* To whom correspondence should be addressed. E-mail: baban{at}cc.kogakuin.ac.jp

A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV.

Keywords     electron energy loss spectroscopy (EELS), scanning transmission electron microscope (STEM), elemental mapping, spatial resolution, ratio map image, three-window method, EELS imaging

Received     14 May 2007, accepted 7 January 2008


Add to CiteULike CiteULike   Add to Connotea Connotea   Add to Del.icio.us Del.icio.us    What's this?




Disclaimer: Please note that abstracts for content published before 1996 were created through digital scanning and may therefore not exactly replicate the text of the original print issues. All efforts have been made to ensure accuracy, but the Publisher will not be held responsible for any remaining inaccuracies. If you require any further clarification, please contact our Customer Services Department.