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Journal of Electron Microscopy Advance Access originally published online on July 4, 2008
Journal of Electron Microscopy 2008 57(4):123-127; doi:10.1093/jmicro/dfn010
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© The Author 2008. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi1,2*, Ayako Hashimoto1,2, Masayuki Shimojo2,4, Kazutaka Mitsuishi2,3 and Kazuo Furuya2

1 Advanced Nano-characterization Center, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003
2 High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003
3 Quantum Dot Research Center, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003 and
4 Advanced Science Research Laboratory, Saitama Institute of Technology, 1690 Fusaiji, Fukuya, Saitama 369-0293, Japan

* To whom correspondence should be addressed. E-mail: takeguchi.masaki{at}nims.go.jp

A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

Keywords     confocal scanning transmission electron microscopy, stage-scanning system, piezo actuators, optical sectioning, three-dimensional scanning, pinhole

Received     21 February 2008, accepted 2 June 2008


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