Journal of Electron Microscopy Advance Access originally published online on July 25, 2008
Journal of Electron Microscopy 2008 57(5):149-158; doi:10.1093/jmicro/dfn014
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Energy-drift correction of electron energy-loss spectra from prolonged data accumulation of low SNR signals
Department of Materials, Physics and Energy Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
* To whom correspondence should be addressed. E-mail: s-mutoh{at}nucl.nagoya-u.ac.jp
The demand for analysis of trace elements in atomically localized areas by electron energy-loss spectroscopy (EELS) in transmission electron microscopy is increasing. Unfortunately, the prolonged data acquisitions required to achieve an acceptable signal-to-noise ratio (SNR) tend to deteriorate the energy resolution because of spectral drifts due to instrumental instability. We developed a macroscript for a Gatan Digital MicrographTM to control an ENFINA 1000 EEL spectrometer that corrects for energy drifts during data accumulation. The script successfully achieved a core-loss spectrum for a sample having
1 at% elemental concentration, and provided a sufficient SNR for chemical state analysis.
Keywords EELS, energy drift, DM script, trace elements
Received 11 June 2008, accepted 29 June 2008