Journal of Electron Microscopy Advance Access originally published online on November 6, 2008
Journal of Electron Microscopy 2008 57(6):195-201; doi:10.1093/jmicro/dfn022
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Rapid autotuning for crystalline specimens from an inline hologram
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
* To whom correspondence should be addressed. E-mail: 9az{at}ornl.gov
A method to measure the aberration function for a crystalline specimen from a single inline hologram or Ronchigram by dividing it up into small patches is derived. Measurement of aberrations is demonstrated from both dynamical simulations and experimental Ronchigrams. This method should allow rapid fine-tuning on a variety of crystalline specimens and represents a key step toward active optics for scanning transmission electron microscopy.
Keywords STEM, aberration correction, Ronchigram, aberration measurement, Cs
Received 24 May 2008, accepted 7 October 2008