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Journal of Electron Microscopy Advance Access originally published online on January 15, 2009
Journal of Electron Microscopy 2009 58(1):1-6; doi:10.1093/jmicro/dfn031
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© The Author 2009. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Morphology and chemical composition analysis of inorganic nanosheets by the field-emission scanning electron microscope system

Qinghui Li1, Yuki Ono1, Yoshikazu Homma1, Izumi Nakai1,*, Katsutoshi Fukuda2, Takayoshi Sasaki2, Keiichi Tanaka3 and Satoshi Nakayama3

1 Faculty of Science, Tokyo University of Science, Shinjuku, Tokyo 162-8601
2 Nanoscale Materials Center, NIMS, Tsukuba, Ibaraki 305-004
3 SII NanoTechnology Inc., Sunto-gun, Shizuoka 410-1393, Japan

* To whom correspondence should be addressed. E-mail: inakai{at}rs.kagu.tus.ac.jp

Nanosheets can be used as building blocks to fabricate versatile nanostructured materials. In this paper, morphology of the Cs4W11O36 and Nb3O8 and TaO3 sheets with different layers are analyzed by different field-emission scanning electron microscopes (FE-SEMs). Chemical composition of the single-layered Cs4W11O36 with thickness of about 2 nm, and multilayered Nb3O8 nanosheets with thickness of less than 14 nm are analyzed by both the Si(Li) solid-state detector and transition edge sensor (TES) microcalorimeter, successfully. The effects of energy resolution, accelerating voltage and substrate on the quantitative analysis are discussed briefly.

Keywords     nanosheets, field-emission scanning electron microscope, accelerating voltage, solid-state detector, transition edge sensor

Received     17 June 2008, accepted 10 December 2008


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