Journal of Electron Microscopy Advance Access originally published online on January 21, 2009
Journal of Electron Microscopy 2009 58(3):87-97; doi:10.1093/jmicro/dfn030
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Published by Oxford University Press on behalf of the United States Government, 2009.
This article appears in the following Journal of Electron Microscopy issue: Special number: Advanced electron microscopy in materials physics [View the issue table of contents]
Atomic-resolution spectroscopic imaging: past, present and future
1 Materials Science and Technology Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN 37831-6030
2 Department of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, USA
* To whom correspondence should be addressed. E-mail: pennycooksj{at}ornl.gov
This review examines the development of atomically resolved electron energy loss spectroscopy from the first demonstration of plane-by-plane compositional profiling, through column-by-column spectroscopy to full two-dimensional and potentially three-dimensional spectroscopic imaging. Examples will be presented to highlight the increasing analytical sensitivity and image contrast obtained through each generation of aberration correction, moving towards the ultimate goal of mapping electronic structure inside materials with atomic resolution.
Keywords annular dark field, column-by-column spectroscopy, electron energy loss, scanning transmission electron microscopy, spectroscopy
Received 15 September 2008, accepted 9 December 2008
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