Skip Navigation


Journal of Electron Microscopy Advance Access originally published online on July 4, 2008
Journal of Electron Microscopy 2008 57(4):123-127; doi:10.1093/jmicro/dfn010
This Article
Right arrow Full Text
Right arrow Full Text (PDF)
Right arrow All Versions of this Article:
57/4/123    most recent
dfn010v1
Right arrow Alert me when this article is cited
Right arrow Alert me if a correction is posted
Services
Right arrow Email this article to a friend
Right arrow Similar articles in this journal
Right arrow Similar articles in ISI Web of Science
Right arrow Similar articles in PubMed
Right arrow Alert me to new issues of the journal
Right arrow Add to My Personal Archive
Right arrow Download to citation manager
Right arrowRequest Permissions
Google Scholar
Right arrow Articles by Takeguchi, M.
Right arrow Articles by Furuya, K.
PubMed
Right arrow PubMed Citation
Right arrow Articles by Takeguchi, M.
Right arrow Articles by Furuya, K.
Social Bookmarking
Add to CiteULike   Add to Connotea   Add to Del.icio.us  
What's this?

© The Author 2008. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi1,2*, Ayako Hashimoto1,2, Masayuki Shimojo2,4, Kazutaka Mitsuishi2,3 and Kazuo Furuya2

1 Advanced Nano-characterization Center, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003
2 High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003
3 Quantum Dot Research Center, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003 and
4 Advanced Science Research Laboratory, Saitama Institute of Technology, 1690 Fusaiji, Fukuya, Saitama 369-0293, Japan

* To whom correspondence should be addressed. E-mail: takeguchi.masaki{at}nims.go.jp

A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

Keywords     confocal scanning transmission electron microscopy, stage-scanning system, piezo actuators, optical sectioning, three-dimensional scanning, pinhole

Received     21 February 2008, accepted 2 June 2008


Add to CiteULike CiteULike   Add to Connotea Connotea   Add to Del.icio.us Del.icio.us    What's this?




Disclaimer:
Please note that abstracts for content published before 1996 were created through digital scanning and may therefore not exactly replicate the text of the original print issues. All efforts have been made to ensure accuracy, but the Publisher will not be held responsible for any remaining inaccuracies. If you require any further clarification, please contact our Customer Services Department.