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Journal of Electron Microscopy Advance Access originally published online on June 22, 2009
Journal of Electron Microscopy 2009 58(6):357-361; doi:10.1093/jmicro/dfp030
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© The Author 2009. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

STEM imaging of 47-pm-separated atomic columns by a spherical aberration-corrected electron microscope with a 300-kV cold field emission gun

Hidetaka Sawada1,2*, Yasumasa Tanishiro1,3, Nobuhiro Ohashi3, Takeshi Tomita1,2, Fumio Hosokawa1,2, Toshikatsu Kaneyama1,2, Yukihito Kondo1,2 and Kunio Takayanagi1,3

1 Japan Science and Technology Agency, CREST, 5 Sanbancho, Chiyoda-ku, Tokyo, 102-0075
2 JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo, 196-8558 and
3 Department of Physics, Tokyo Institute of Technology, 2-12-1-H-51 Oh-okayama, Meguro-ku, Tokyo 152-8551, Japan

* To whom correspondence should be addressed. E-mail: hsawada{at}jeol.co.jp

A spherical aberration-corrected electron microscope has been developed recently, which is equipped with a 300-kV cold field emission gun and an objective lens of a small chromatic aberration coefficient. A dumbbell image of 47 pm spacing, corresponding to a pair of atomic columns of germanium aligned along the [114] direction, is resolved in high-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) with a 0.4-eV energy spread of the electron beam. The observed image was compared with a simulated image obtained by dynamical calculation.

Keywords     sub-50 pm resolution, aberration correction, cold field emission gun, electron microscope, scanning transmission electron microscopy, high-angle annular dark field image

Received     24 February 2009, accepted 16 May 2009


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