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Journal of Electron Microscopy Advance Access published online on July 8, 2009
Journal of Electron Microscopy, doi:10.1093/jmicro/dfp033
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© The Author 2009. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Correction of higher order geometrical aberration by triple 3-fold astigmatism field

Hidetaka Sawada1,2*, Takeo Sasaki1,2, Fumio Hosokawa2, Shuuichi Yuasa2, Mitsuhisa Terao2, Muneyuki Kawazoe2, Tomohiro Nakamichi2, Toshikatsu Kaneyama1,2, Yukihito Kondo2, Koji Kimoto1,3 and Kazutomo Suenaga1,4

1 Japan Science and Technology Agency, CREST, 5 Sanbancho, Chiyoda-ku, Tokyo, 102-0075
2 JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 196-8558
3 National Institute for Materials Science, 1-1 Namiki, Tsukukba, Ibaraki 305-0044
4 Research Center for Advanced Carbon Materials, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, Tsukuba 305-8565, Japan

* To whom correspondence should be addressed. E-mail: hsawada{at}jeol.co.jp

A new concept of a spherical aberration correction system using three dodecapoles is proposed. The system compensates for higher order aberration of 6-fold astigmatism, which generally limits a uniform phase area for image forming and probe forming in an electron microscope with a conventional two-hexapole corrector. Triple 3-fold astigmatism field is used to correct the spherical aberration of the objective lens, and the total 3-fold astigmatism is eliminated by their combination. The optimum azimuth relationship among three dodecapoles is calculated to eliminate the 6-fold astigmatism. The principle of the method was verified using a mathematically complex representation. This new concept was experimentally tested with a scanning transmission electron microscope at 60 kV acceleration. The 6-fold astigmatism was certainly compensated and the coherent convergent angle became almost twice compared to a conventional double hexapole system.

Keywords     six-fold astigmatism, aberration correction, Ronchigram, trajectory, delta

Received      6 April 2009, accepted 1 June 2009


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