Journal of Electron Microscopy Advance Access published online on September 12, 2009
Journal of Electron Microscopy, doi:10.1093/jmicro/dfp044
A specimen preparation technique for plane-view studies of surfaces using transmission electron microscopy
1 Norwegian Defence Research Establishment, PO Box 25, NO-2027 Kjeller
2 Department of Physics, University of Oslo, PO Box 1048 Blindern, NO-0316 Oslo, Norway
* To whom correspondence should be addressed. E-mail: steinar.foss{at}ffi.no
A method for preparing plane-view transmission electron microscope (TEM) samples is presented. With this inclined pseudo-plane-view technique, the undisturbed surface of the sample can be studied in plane view. Thus, nanostructures on the surface of a substrate can be studied with TEM in much the same way as with scanning electron microscopy (SEM), but in transmission at a much higher spatial resolution and with the opportunity of performing nanoscale diffraction. A glued sandwich with two surfaces facing each other was thinned at a low angle relative to the surfaces. The resultant construction contained thin wedges of the surfaces upon which it was possible to do TEM analysis. SEM analysis before and TEM analysis after such sample preparation was found to be consistent.
Keywords plane view, HgTe, TEM, TEM sample preparation, nanoparticles, surface analysis
Received 9 February 2009, accepted 16 August 2009