Journal of Electron Microscopy 48(4): 345-353 (1999)
© 1999 Oxford University Press
Cross-sectional HRTEM study of (Nd,Ce)2CuO4 superconducting films, prepared by post-oxidation of Cu/Nd(Ce) metal layers on SrTiO3
1National Institute for Research in Inorganic Materials 1-1 Namiki, Tsukuba, Ibaraki 305-0044
2Institute of Earth Science, School of Education, Waseda University 1-6-1, Nishi-Waseda, Shinjuku-ku, Tokyo 169-50, Japan
*To whom correspondence should be addressed. E-mail: matsui{at}nirim.go.jp
Thin films of the electron-doped superconductor (Nd,Ce)2CuO4 (NCCO) have successfully been prepared by post-oxidation of double-layer films of Nd(Ce) and Cu metals, previously deposited onto the (001) surface of SrTiO3 (STO) by DC magnetron-sputtering. The microstructure of a series of thin films after oxidation in air at 600-1100°C are examined by cross-sectional high-resolution transmission electron microscopy (HRTEM). The formation of NCCO crystallites is observed at the film/STO interface, when the oxidation temperature is higher than 700°C, but single-crystalline films are not obtained by an oxidation below 900°C. Single-crystalline NCCO films of good epitaxial relation with the STO substrate are, on the other hand, obtained by post-oxidation between 900 and 1000°C, and superconductivity at Tc=14 K is achieved by additional annealing at 400°C in vacuum. The NCCO films obtained by post-oxidation above 1000°C, however, tend to contain many planar faults, and also thin layers with unknown structures are often formed at the NCCO/STO interface.
Keywords high-Tc superconductor, electron doping, cross-sectional TEM, thin films
Received 16 October 1998, accepted 1 February 1999