Skip Navigation

This Article
Right arrow Full Text (PDF)
Right arrow Alert me when this article is cited
Right arrow Alert me if a correction is posted
Services
Right arrow Email this article to a friend
Right arrow Similar articles in this journal
Right arrow Alert me to new issues of the journal
Right arrow Add to My Personal Archive
Right arrow Download to citation manager
Right arrowRequest Permissions
Google Scholar
Right arrow Articles by Komatsu, F.
Right arrow Articles by Miyoshi, M.
Right arrow Search for Related Content
PubMed
Right arrow Articles by Komatsu, F.
Right arrow Articles by Miyoshi, M.
Social Bookmarking
Add to CiteULike   Add to Connotea   Add to Del.icio.us  
What's this?

Journal of Electron Microscopy 48(4): 407-415 (1999)
© 1999 Oxford University Press

Measurement of geometrical dimensions using scanning electron microscopy

F. Komatsu, K. Tsubusaki and M. Miyoshi

Integrated Circuit Advanced Process Technology Department Toshiba Corp. 8, Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan

In this paper, in-process measurement method of geometrical dimensions of fine patterns using the principle of stereoscopy and digital image processing techniques is presented. We have applied this measurement method to sub-micrometer patterns with variable shapes in fabrication steps. Then, we have verified that an accuracy of 0.063 µm and a repeatability of 0.14 µm in depth measurements of hole patterns with a sharp side wall angle, an accuracy of 0.75° and a repeatability of 0.53° in measurements of a taper angle of photoresist patterns were achieved.

Keywords     geometrical dimension measurement, image processing, stereoscopy, SEM

Received     24 February 1998, accepted 11 March 1999


Add to CiteULike CiteULike   Add to Connotea Connotea   Add to Del.icio.us Del.icio.us    What's this?




Disclaimer: Please note that abstracts for content published before 1996 were created through digital scanning and may therefore not exactly replicate the text of the original print issues. All efforts have been made to ensure accuracy, but the Publisher will not be held responsible for any remaining inaccuracies. If you require any further clarification, please contact our Customer Services Department.