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Journal of Electron Microscopy 49(1): 53-59 (2000)
© 2000 Oxford University Press

A new method for dynamical HOLZ calculations

Shinya Hara, Takashi Yamazaki*, Fumihiko Uesugi, Kazuto Watanabe1 and Iwao Hashimoto

Department of Physics, Science University of Tokyo 1-3 Kagurazaka, Shinjuku-ku Tokyo 162-8601
1Tokyo Metropolitan College of Technology 1-10-40 Higashiohi, Shinagawa-ku, Tokyo 140-0011, Japan

*To whom correspondence should be addressed. E-mail:al299660{at}rs.kagu.sut.ac.jp

An exact scheme for dynamical HOLZ calculations has been developed with a matrix formula based on the modified Bethe's theory and current flow without the small angle approximation. The HOLZ intensity must be calculated with the current flow for electron beams. For a quantitative intensity calculation at large illumination, not only the current flow in diffracted beams from an exit surface but also the current flow in a primary beam plays an important role.

Keywords     electron diffraction, CBED, HOLZ, dynamical calculation, current flow, Si

Received     11 December 1998, accepted 21 October 1999


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