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Journal of Electron Microscopy Advance Access originally published online on February 22, 2006
Journal of Electron Microscopy 2005 54(6):497-503; doi:10.1093/jmicro/dfi071
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© The Author 2006. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please email: journals.permissions@oxfordjournals.org

Development of a gas injection/specimen heating holder for use with transmission electron microscope

Takeo Kamino1,*, Toshie Yaguchi1, Mitsuru Konno1, Akira Watabe1, Tomotaka Marukawa2, Takayuki Mima2, Kotaro Kuroda2, Hiroyasu Saka2, Shigeo Arai3, Hiroshi Makino4, Yoshinao Suzuki4 and Keisuke Kishita4

1 Hitachi High Technologies Corporation Hitachinaka Ibaraki 312-0057, Japan
2 Graduate School of Engineering, Nagoya University Nagoya 464-8603, Japan
3 1MV Electron Microscopy Laboratory, Eco-Topia Science Institute, Nagoya University Nagoya 464-8603, Japan
4 Material Analysis Department, Toyota Motor Corporation Toyota 471-8572, Japan

*To whom correspondence should be addressed. E-mail: kamino-takeo{at}naka.hitachi-hitec.com

A new gas injection/specimen heating holder is developed for the purpose of in situ observation of gas reaction of materials at high temperatures in a transmission electron microscope at near-atomic resolution. A fine tungsten wire is employed as a heating element of the holder and a battery is used as the power source. Gas was injected onto specimens in the form of particles lying on the heating element via a nozzle. The maximum pressure near specimens was middle of 10–2 Pa, while the pressure in the electron-gun chamber was kept to 2 x 10–4 Pa. This gas injection/specimen heating holder was applied to observe solid–gas reactions. The reactions observed include oxidation of pure In into In2O3, reduction of SiO2 into Si and re-oxidation of Si into SiO2.

Keywords     in situ TEM, gas reaction, high temperature, specimen heating holder, high resolution electron microscopy

Received     15 September 2005, accepted 27 December 2005


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