Journal of Electron Microscopy Advance Access published online on July 7, 2005
Journal of Electron Microscopy, doi:10.1093/jmicro/dfh107
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1 Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100080, China
* To whom correspondence should be addressed. The image deconvolution technique in combination with dynamical scattering effect correction developed previously for crystal defect investigation has been modified to meet the needs of interface studies and applied to a [111] twin model of Si. Elliptical windows are utilized as a new means for Fourier filtering and correcting the amplitudes of reflections. Images were simulated with a 200 kV field-emission highresolution electron microscope. After image restoration, four images simulated with different defocus values were transformed into structure images with atomic columns revealed individually at correct positions. The effectiveness of the technique is discussed.
Received May 26, 2004
Accepted December 1, 2004
Full-length paper
Restoring atomic configuration at interfaces by image deconvolution
Fang-hua Li, E-mail: lifh{at}aphy.iphy.ac.cn
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