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Journal of Electron Microscopy Advance Access published online on June 30, 2005
Journal of Electron Microscopy, doi:10.1093/jmicro/dfi025
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© The Author 2005. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For Permissions, please email: journals.permissions@oupjournals.org
Received February 2, 2005
Accepted March 8, 2005

Full-length paper

Development of a real-time stereo transmission electron microscope

Takayoshi Tanji 1*, Hiromochi Tanaka 1, and Takayuki Kojima 1

1 Department of Electronics, Graduate School of Engineering, Nagoya University, Chikusa, Nagoya 464-8603, Japan

* To whom correspondence should be addressed.
Takayoshi Tanji, E-mail: tanji{at}nuee.nagoya-u.ac.jp


  Abstract

A new transmission electron microscope that allows for stereoscopic observations in real time at a video rate has been developed. In order to make stereo pairs at a high speed, illumination of a specimen from two directions instead of specimen tilting is adopted. Two electrostatic deflectors make it possible to alternate the illumination direction within a blank period of 1.2 ms between two adjacent video fields. Three dimensional displays give observers a stereo impression without the need for special glasses. By considering the circle of least confusion due to spherical aberration, a lateral resolution <1 nm and a longitudinal resolution of 6.3 nm are possible with a proper defocused condition. This improvement of the resolution is confirmed for the image of Au fine particles. The motion of objects in the lateral direction can be detected up to a speed of 8.3 nm s-1. Using this microscope fine particles of ZnO were observed.

Keywords: stereo TEM; real-time observation; 3-D observation; tilted illumination.
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