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Journal of Electron Microscopy Advance Access published online on September 29, 2005
Journal of Electron Microscopy, doi:10.1093/jmicro/dfi062
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© The Author 2005. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For Permissions, please email: journals.permissions@oxfordjournals.org
Received May 30, 2005
Accepted September 5, 2005

Full-length paper

Evolutionary computation applied to the reconstruction of 3-D surface topography in the SEM

Tetsuji Kodama 1*, Xiaoyuan Li 2, Kenji Nakahira 3, and Dai Ito 3

1 Department of Information Engineering, Faculty of Engineering, Mie University, Tsu 514-8507, Japan
2 Department of Computational Science and Engineering, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
3 Department of Electrical Engineering, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

* To whom correspondence should be addressed.
Tetsuji Kodama, E-mail: kodama{at}pa.info.mie-u.ac.jp


  Abstract

A genetic algorithm has been applied to the line profile reconstruction from the signals of the standard secondary electron (SE) and/or backscattered electron detectors in a scanning electron microscope. This method solves the topographical surface reconstruction problem as one of combinatorial optimization. To extend this optimization approach for three-dimensional (3-D) surface topography, this paper considers the use of a string coding where a 3-D surface topography is represented by a set of coordinates of vertices. We introduce the Delaunay triangulation, which attains the minimum roughness for any set of height data to capture the fundamental features of the surface being probed by an electron beam. With this coding, the strings are processed with a class of hybrid optimization algorithms that combine genetic algorithms and simulated annealing algorithms. Experimental results on SE images are presented.

Keywords: evolutionary algorithm; Delaunay triangulation; surface topography; scanning electron microscopy.
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