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Journal of Electron Microscopy Advance Access published online on January 13, 2006
Journal of Electron Microscopy, doi:10.1093/jmicro/dfi069
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© The Author 2006. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For Permissions, please email: journals.permissions@oxfordjournals.org
Received March 4, 2005
Accepted December 12, 2005

Physical: Letter

On the origin of HOLZ lines splitting near interfaces: multislice simulation of CBED patterns

Andrey Chuvilin 1 *, Ute Kaiser 1, Quentin de Robillard 2, and Hans-Jürgen Engelmann 2

1 University of Ulm, Albert Einstein Allee 11, D-89069 Ulm, Germany
2 AMD Saxony LLC & Co. KG, PO Box 110110, D-01330 Dresden, Germany

* To whom correspondence should be addressed.
Andrey Chuvilin, E-mail: andrey.chuvilin{at}uni-ulm.de


  Abstract

Splitting of HOLZ lines on CBED patterns is systematically observed at the proximity of interfaces and prevents local strain measurements by monitoring of line shifts. It was previously suggested that such splitting occurs due to interface-strain relaxation in thin TEM lamella. Here we confirm this model by dynamical simulation of CBED patterns using the multislice algorithm.

Keywords: CBED; strain analysis; line splitting; dynamical simulation; multislice.
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