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Journal of Electron Microscopy Advance Access published online on February 22, 2006
Journal of Electron Microscopy, doi:10.1093/jmicro/dfi071
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© The Author 2006. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For Permissions, please email: journals.permissions@oxfordjournals.org
Received September 15, 2005
Accepted December 27, 2005

Full-length: Physical

Development of a gas injection/specimen heating holder for use with transmission electron microscope

Takeo Kamino 1 *, Toshie Yaguchi 1, Mitsuru Konno 1, Akira Watabe 1, Tomotaka Marukawa 2, Takayuki Mima 2, Kotaro Kuroda 2, Hiroyasu Saka 2, Shigeo Arai 3, Hiroshi Makino 4, Yoshinao Suzuki 4, and Keisuke Kishita 4

1 Hitachi High Technologies Corporation Hitachinaka, Ibaraki 312-0057, Japan
2 Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
3 1MV Electron Microscopy Laboratory, Eco-Topia Science Institute, Nagoya University, Nagoya 464-8603, Japan
4 Material Analysis Department, Toyota Motor Corporation, Toyota 471-8572, Japan

* To whom correspondence should be addressed.
Takeo Kamino, E-mail: kamino-takeo{at}naka.hitachi-hitec.com


  Abstract

A new gas injection/specimen heating holder is developed for the purpose of in situ observation of gas reaction of materials at high temperatures in a transmission electron microscope at near-atomic resolution. A fine tungsten wire is employed as a heating element of the holder and a battery is used as the power source. Gas was injected onto specimens in the form of particles lying on the heating element via a nozzle. The maximum pressure near specimens was middle of 10-2 Pa, while the pressure in the electron-gun chamber was kept to 2 x 10-4 Pa. This gas injection/specimen heating holder was applied to observe solid-gas reactions. The reactions observed include oxidation of pure In into In2O3, reduction of SiO2 into Si and re-oxidation of Si into SiO2.

Keywords: in situ TEM; gas reaction; high temperature; specimen heating holder; high resolution electron microscopy.
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