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Journal of Electron Microscopy Advance Access published online on January 21, 2009
Journal of Electron Microscopy, doi:10.1093/jmicro/dfn030
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© The Author 2009. Published by Oxford University Press on behalf of the United States Government, 2009. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Atomic-resolution spectroscopic imaging: past, present and future

Stephen J. Pennycook1,2*, Maria Varela1, Andrew R. Lupini1, Mark P. Oxley1,2 and Matthew F. Chisholm1

1 Materials Science and Technology Division, Oak Ridge National Laboratory, PO Box 2008, Oak Ridge, TN 37831-6030
2 Department of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, USA

* To whom correspondence should be addressed. E-mail: pennycooksj{at}ornl.gov

This review examines the development of atomically resolved electron energy loss spectroscopy from the first demonstration of plane-by-plane compositional profiling, through column-by-column spectroscopy to full two-dimensional and potentially three-dimensional spectroscopic imaging. Examples will be presented to highlight the increasing analytical sensitivity and image contrast obtained through each generation of aberration correction, moving towards the ultimate goal of mapping electronic structure inside materials with atomic resolution.

Keywords     annular dark field, column-by-column spectroscopy, electron energy loss, scanning transmission electron microscopy, spectroscopy

Received     15 September 2008, accepted 9 December 2008


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