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Journal of Electron Microscopy Advance Access published online on March 1, 2009
Journal of Electron Microscopy, doi:10.1093/jmicro/dfp012
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© The Author 2009. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

Historical aspects of aberration correction

Harald H. Rose

University of Darmstadt, Hochschulstrasse 6, D-64289 Darmstadt, Germany

To whom correspondence should be addressed. E-mail: harald.rose{at}physik.tu-darmstadt.de

A brief history of the development of direct aberration correction in electron microscopy is outlined starting from the famous Scherzer theorem established in 1936. Aberration correction is the long story of many seemingly fruitless efforts to improve the resolution of electron microscopes by compensating for the unavoidable resolution-limiting aberrations of round electron lenses over a period of 50 years. The successful breakthrough, in 1997, can be considered as a quantum step in electron microscopy because it provides genuine atomic resolution approaching the size of the radius of the hydrogen atom. The additional realization of monochromators, aberration-free imaging energy filters and spectrometers has been leading to a new generation of analytical electron microscopes providing elemental and electronic information about the object on an atomic scale.

Keywords     Scherzer theorem, aberration correctors, atomic resolution

Received     14 January 2009, accepted 30 January 2009


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