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Journal of Electron Microscopy Advance Access published online on April 27, 2009
Journal of Electron Microscopy, doi:10.1093/jmicro/dfp021
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© The Author 2009. Published by Oxford University Press on behalf of Japanese Society of Microscopy. All rights reserved. For permissions, please e-mail: journals.permissions@oxfordjournals.org

First application of Cc-corrected imaging for high-resolution and energy-filtered TEM

Bernd Kabius1,*, Peter Hartel2, Maximilian Haider2, Heiko Müller2, Stephan Uhlemann2, Ulrich Loebau2, Joachim Zach2 and Harald Rose3

1 Argonne National Laboratory, 9700 South Cass Avenue, Argonne 60439, IL, USA
2 CEOS GmbH, Engeler Strasse 28, D-69126 Heidelberg
3 Technical University Darmstadt, D-64289 Darmstadt, Germany

* To whom correspondence should be addressed. E-mail: kabius{at}anl.gov

Contrast-transfer calculations indicate that Cc correction should be highly beneficial for high-resolution and energy-filtered transmission electron microscopy. A prototype of an electron optical system capable of correcting spherical and chromatic aberration has been used to verify these calculations. A strong improvement in resolution at an acceleration voltage of 80 kV has been measured. Our first Cc-corrected energy-filtered experiments examining a (LaAlO3)0.3(Sr2AlTaO6)0.7/LaCoO3 interface demonstrated a significant gain for the spatial resolution in elemental maps of La.

Keywords     aberration correction, chromatic aberration, oxides, EFTEM, HRTEM

Received     17 December 2008, accepted 30 March 2009


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